Nano and Micro-Fabrication Platform
Aix-Marseille Université
To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created in 2006 the PLANETE technology platform.
This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.
PE11_8 - Engineering of alternative established or emergent materials - Materials Engineering
PE11_9 - Nanomaterials engineering, e.g. nanoparticles, nanoporous materials, 1D & 2D nanomaterials - Materials Engineering
Nanotechnology
Nanoscience
Microfabrication
Microfluidics
Lithography
Etching
Deposition
Plasma
Silicon
Semiconductor
Metal
The PLANETE platform is open to the scientific research community as well as to innovative companies (both public and private sectors) to carry out R&D projects.
A technical assistance from the platform team members is available on-site.
PLANETE is equipped with numerous technological equipment well adapted to scientific and tecnological projects based on the following processes:
-Nanofabrication (Focused charged particle beam assisted deposition, lithography and etching),
-Optical and electron beam lithography,
-Deposition by evaporation and sputtering,
-Wet chemical and dry plasma etching,
-Optical microscopy,
-Contact profilometry
-Electrical measurements.