1. Research Infrastructures
  2. Nano and Micro-Fabrication Platform

Nano and Micro-Fabrication Platform

CONTACT
Coordinates 43.29236346203756, 5.359133426541125
Contact name Igor Ozerov
CIVIS Label No
Acronym PLANETE-PTA
Scientific domain

PE11_8 - Engineering of alternative established or emergent materials - Materials Engineering


 

PE11_9 - Nanomaterials engineering, e.g. nanoparticles, nanoporous materials, 1D & 2D nanomaterials - Materials Engineering


Keywords

Nanotechnology


 

Nanoscience


 

Microfabrication


 

Microfluidics


 

Lithography


 

Etching


 

Deposition


 

Plasma


 

Silicon


 

Semiconductor


 

Metal


Partner institution

Aix-Marseille Université


Website No
Technical staff available No
Remote access details The PLANETE platform is open to the scientific research community as well as to innovative companies (both public and private sectors) to carry out R&D projects. A technical assistance from the platform team members is available on-site.
Remote access available No
Open to external users No
Equipment PLANETE is equipped with numerous technological equipment well adapted to scientific and tecnological projects based on the following processes: -Nanofabrication (Focused charged particle beam assisted deposition, lithography and etching), -Optical and electron beam lithography, -Deposition by evaporation and sputtering, -Wet chemical and dry plasma etching, -Optical microscopy, -Contact profilometry -Electrical measurements.
Open access to updated information database No
Online booking system details http://www.cinam.univ-mrs.fr/cinam/wp-content/uploads/2020/04/ChartePLANETE-english.pdf Also signatory of the Charte des Plateformes Technologiques Aix-Marseille (PTA): https://www.univ-amu.fr/system/files/2021-07/Charte%20PTF%20AMU%20M%C3%A0J21.docx.pdf
Online booking system available No
Description To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created in 2006 the PLANETE technology platform. This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.