To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created in 2006 the PLANETE technology platform.
This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.
Description
To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created in 2006 the PLANETE technology platform.
This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.
Partner institution
Aix-Marseille Université
Scientific domain
PE11_8 - Engineering of alternative established or emergent materials - Materials Engineering
PE11_9 - Nanomaterials engineering, e.g. nanoparticles, nanoporous materials, 1D & 2D nanomaterials - Materials Engineering
Keywords
Nanotechnology
Nanoscience
Microfabrication
Microfluidics
Lithography
Etching
Deposition
Plasma
Silicon
Semiconductor
Metal