1. Research Infrastructures
  2. Detail
To satisfy the demand for nanolithography, nanostructuring and nano-object connectivity, the Centre Interdisciplinaire de Nanoscience de Marseille (CINaM) has created in 2006 the PLANETE technology platform. This platform, located in a 250 m² clean room and bringing together multiple technological facilities and equipment, is managed by a team of engineers who are responsible for its operation.

Partner institution

Aix-Marseille Université

Scientific domain

PE11_8 - Engineering of alternative established or emergent materials - Materials Engineering PE11_9 - Nanomaterials engineering, e.g. nanoparticles, nanoporous materials, 1D & 2D nanomaterials - Materials Engineering

Keywords

Nanotechnology Nanoscience Microfabrication Microfluidics Lithography Etching Deposition Plasma Silicon Semiconductor Metal